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MEMS and NEMS

Description

  • To introduce the concepts of micro and nano electromechanical devices
  • To know the fabrication process of Microsystems
  • To know the design concepts of micro sensors and micro actuators
  • To introduce the concepts of quantum mechanics and nano systems

What Will I Learn?

  • Interpret the basics of micro/nano electromechanical systems including their applications and advantages
  • Recognize the use of materials in micro fabrication and describe the fabrication processes including surface micromachining, bulk micromachining and LIGA.
  • Analyze the key performance aspects of electromechanical transducers including sensors and actuators

Topics for this course

5 Lessons50h

MEMS AND NEMS

Lesson 1-INTRODUCTION TO MEMS AND NEMS
Lesson 2-MEMS FABRICATION TECHNOLOGIES
Lesson 3-MICRO SENSORS
Lesson 4-MICRO ACTUATORS
Lesson 5-NANO DEVICES

About the instructor

0 (0 ratings)

518 Courses

3 students

Free

Material Includes

  • Marc Madou, ―Fundamentals of Microfabrication‖, CRC press 1997.
  • Stephen D. Senturia,‖ Micro system Design‖, Kluwer Academic Publishers,2001
  • Tai Ran Hsu ,‖MEMS and Microsystems Design and Manufacture‖ ,Tata Mcraw Hill, 2002.
  • Chang Liu, ―Foundations of MEMS‖, Pearson education India limited, 2006,
  • Sergey Edward Lyshevski, ―MEMS and NEMS: Systems, Devices, and Structures‖ CRC Press, 2002

Requirements

  • B.E/Diploma Students Can Pursue this Course

Target Audience

  • All Engineering Students Can Participate