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MEMS and NEMS

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by super admin
Course level: Intermediate
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Categories B.E/ B.Tech/B.Arch
Duration 50h
Total Enrolled 0
Last Update June 2, 2021

Description

To introduce the concepts of micro and nano electromechanical devices
To know the fabrication process of Microsystems
To know the design concepts of micro sensors and micro actuators
To introduce the concepts of quantum mechanics and nano systems

What Will I Learn?

Interpret the basics of micro/nano electromechanical systems including their applications and advantages
Recognize the use of materials in micro fabrication and describe the fabrication processes including surface micromachining, bulk micromachining and LIGA.
Analyze the key performance aspects of electromechanical transducers including sensors and actuators

Topics for this course

5 Lessons50h

MEMS AND NEMS

Lesson 1-INTRODUCTION TO MEMS AND NEMS

Lesson 2-MEMS FABRICATION TECHNOLOGIES

Lesson 3-MICRO SENSORS

Lesson 4-MICRO ACTUATORS

Lesson 5-NANO DEVICES

About the instructor

super admin

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518 Courses

3 students

Free

Material Includes

Marc Madou, ―Fundamentals of Microfabrication‖, CRC press 1997.
Stephen D. Senturia,‖ Micro system Design‖, Kluwer Academic Publishers,2001
Tai Ran Hsu ,‖MEMS and Microsystems Design and Manufacture‖ ,Tata Mcraw Hill, 2002.
Chang Liu, ―Foundations of MEMS‖, Pearson education India limited, 2006,
Sergey Edward Lyshevski, ―MEMS and NEMS: Systems, Devices, and Structures‖ CRC Press, 2002

Requirements

B.E/Diploma Students Can Pursue this Course

Target Audience

All Engineering Students Can Participate